JPH0250955U - - Google Patents
Info
- Publication number
- JPH0250955U JPH0250955U JP13016888U JP13016888U JPH0250955U JP H0250955 U JPH0250955 U JP H0250955U JP 13016888 U JP13016888 U JP 13016888U JP 13016888 U JP13016888 U JP 13016888U JP H0250955 U JPH0250955 U JP H0250955U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- arm
- ion implantation
- semiconductor substrate
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988130168U JPH0728694Y2 (ja) | 1988-10-03 | 1988-10-03 | 半導体基板イオン注入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988130168U JPH0728694Y2 (ja) | 1988-10-03 | 1988-10-03 | 半導体基板イオン注入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0250955U true JPH0250955U (en]) | 1990-04-10 |
| JPH0728694Y2 JPH0728694Y2 (ja) | 1995-06-28 |
Family
ID=31385096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988130168U Expired - Fee Related JPH0728694Y2 (ja) | 1988-10-03 | 1988-10-03 | 半導体基板イオン注入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0728694Y2 (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0163130U (en]) * | 1987-10-16 | 1989-04-24 |
-
1988
- 1988-10-03 JP JP1988130168U patent/JPH0728694Y2/ja not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0163130U (en]) * | 1987-10-16 | 1989-04-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0728694Y2 (ja) | 1995-06-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |